Introducing a New Actuation Signal to Improve the Reliability of Capacitive RF MEMS Switch
Subject Areas : electrical and computer engineeringM. Zarghami 1 , Y. Mafinejad 2 , M. Zarghami 3 , Kh. Mafinezhad 4
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Keywords: Switch radio frequency microelectromechanical system (RF MEMS) dielectric charging actuation voltage,
Abstract :
In this paper a modified novel dual pulse actuation signal has been proposed to reduce dielectric charging in microelectromechanical system switches. The waveform has a significant impact in reducing the dielectric charging; therefore the amount of charge density in the proposed waveform has decreased 7.2% than the dual pulse waveform, although the newest waveform (novel dual pulse) has shown a 5% reduction in dielectric charging. So, the proposed actuation signal waveform will increase the lifetime of switch. We utilized mathematical and transient circuit models to calculate the amount of charge density in the dielectric and finally, the new actuation signal waveform has shown better performance than the other prevalent actuation signal waveforms.
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