Reducing Actuation Voltage of the Elliptical RF-MEMS Switches Using a Novel Cutting Pattern
Subject Areas : electrical and computer engineeringMohammad Jahanbakht 1 , A. A. Lotfi-Neyestanak 2 , M. Lotfi-Neyestanak 3 , Mohammad Tondro-Aghmiyouni 4
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Keywords: Elliptical structure micro electromechanical switches actuation voltage MEMS,
Abstract :
The elliptical structure for the micro electromechanical switches with low actuation voltage is proposed to work at the Ka band. The actuation voltage of this structure is shown to further been reduced by 21% with transverse cutting patterns. This Switch will then be analyzed to extract its parameters such as Insertion Loss, Return Loss, and Deformation Posture. The effect of the actuation voltage on the deformation of the bridge will then be analyzed and the results would be compared with other common bridges. This switch may be used as a low loss and effective element for much complicated systems such as distributed phase shifters and phased array applications.
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